Development of Veri cation Environment for PMB (Process monitoring Box) in nm Technology

Abstract

PM CONTROL is a cell to be used for process monitoring, on chip compensation to save power. It measures the performance of the chip for the main features. The process monitoring can be used at EWS (wafer level test) to check that the chip remains within predefined process limits or at application level during product lifetime for temperature monitoring, compensation, debug and failure analysis. Each process option is measured with a dedicated sensor including two oscillators. One oscillator measures the speed of NMOS and PMOS separately and other measures the leakage.PM CONTROL supports two types of sensors, NON-CPR and CPR sensors. CPR sensor which is used for critical path's transistors performance measurement and RC interconnect effect measurement. Work embodied in this thesis presents verification of PROMIP by running the developed testcases and making layouts of standard cell libraries which are used for the development of the PMB sensors. Layouts were prepared from the given schematics of the sensors. DRC and LVS were run on these developed layouts. CDL and GDS les were extracted from the layouts and schematics. Netlist will be generated from these les. Netlist le will be simulated. Packaging were done for sensor libraries by extracting all files.