Study of Flow in Micro-channels using DSMC Approach

Abstract

The recent advancements in the technology which has the obvious direction towards the miniaturization of electronics devices has led many researches and also has opened many branches towards such technologies.The usage of MEMS is the essential part of the recent chunk which has acquired by human intellgence.The MEMS are per say miniature version of the battery cells which has the dimensions in microns and inside the MEMS device there are many micro channels in which the fluid flaw must be studied in order to achieve better performance.

Keeping that in mind,here we have taken a 2D rectangular geometry which is the typical channel shape in most MEMS like MOSFET and others.The flow inside that channel has been studied with certain assumptions and boundary condtitions and some pre-requisites as well.The reference fluid here taken is Argon(Ar) and the temperature is taken at 300k and adiabatic conditions are assumed.

The different parameters are varied according to the requirement of the study and different juxtapose of parameters has been used .We have varied Aspect ratio of a channel,different knudsen numbers,different TMAC values and studied the effect on the macroscopic quantities like velocity,pressure and temperature.