Dynamic Analysis Of Electro Statically Actuated Variable Cross-Section Microcantilever Beam With Squeeze Film Damping

Abstract

The main objective of this dissertation is to present hybrid numerical-analytical approach to simulate microelectromechanical systems (MEMS). It includes electro-static actuation, static pull-in, dynamic pull-in, squeeze film damping etc since they posses vital role in their fabrication. Microcantilever beam is considered for analysis since microbeams are used in various applications as sensor, actuators and switching device. In first part of thesis, we have carried out static analysis for prismatic and non- prismatic micro cantilever beam using an efficient numerical technique based on Galerkin's method. The pull-in parameters are found out using voltage iteration scheme designed to solve polynomial equation. Dynamic analysis is also carried out prismatic and non- prismatic micro cantilever beam using Galerkin's approach and dynamic pull-in parameters are determined using state-space method and phase plane plots. The results are validated with published literature. In second part we have included squeeze film damping and determination of limiting values of voltage and dimensionless ratio of coefficient of damping due to squeeze film damping. Also the effect of system parameters on squeeze film damping and pull-in parameters is studied.