Computation Lithography Hotspot Verification

Abstract

LMC (Lithographic Manufacturing Check) is the process which involves the use of a template to print circuit pattern on actual device.LMC is one of the process which comes under OPC (Optical Proximity Correction).Main Objective of Optical Proximity Correction is to find out defects and making required correction on it before actual printing start on wafer.OPC is generally works on different nano meter technology and via simulating result of chip it can find out defects before actual printing on wafer start.Due to whole process of OPC it can improve yield of the data which leads to improvement in overall cost,time and effort for actual manufacturing.